Nyob rau hauv cov txheej txheem semiconductor), wafer kev nyab xeeb yuav tsum muaj ze-zoo huv huv thiab ruaj khov. Tsoos hlau los yog polymer cabrier discs tau muaj mob rau particle, thiab thermal deformation, uas ncaj qha cuam tshuam nti cov txiaj ntsig. High-purity aluminium oxide ceramic discs (al₂o₃ ntau dua lossis sib npaug, thiab corrosion defortion, thiab corrospensable tseem ceeb siv tau hauv kev tsim cov txheej txheem siab.
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Vim li cas Alumina Ceramic Discs Qhov kev xaiv zoo tagnrho rau Wafer tsim?
1. Qhov kawg Kev Kho Mob
Purity ntawm ntau tshaj 99.6%, hlau ion tseb ntawm<0.1 ppb, preventing wafer contamination
Nto roughness ra <0.1 μm, mus txog RA 0.02 μm Tom qab Daim iav Polishing (sib ntsib EUV txheej txheem tseev kom muaj)
2. Nano-theem thermal tshuab ruaj khov
Thermal nthuav tawm coefficient ntawm 7.2 × 10⁻⁶ /℃(zoo ib yam li Silicon Wafers), deformation ntawm kev kub siab<0.5 μm
Zoo heev boilal boilort tiv taus; tuaj yeem tiv thaiv cov tsheb kub ceev ceev los ntawm chav sov txog 500 degree
3. Anti-zoo li qub thiab tshuaj lom neeg tiv taus
Ntim tsis kam> 10¹⁴ ω · cm, muaj txiaj ntsig zoo tiv thaiv electrostatic puas (ESD)
Resistant rau acid thiab alkali corrosion, nrog ib lub neej pabcuam ntawm ntau dua 1000 lub voj voog hauv etching thiab tu cov txheej txheem
Kev Lag Luam Kev Lag Luam: Cov Qauv rau Cov Txheej Txheem Advanced
1. Tsmc cov ntaub ntawv xeem tau qhia tau tias piv rau cov tais hlau, aluminium tej ceramic cerairs rau saum npoo ntawm 12-nti wafers los ntawm 83%.
2. Cov ntaub ntawv thov (Amat) muaj cov khoom siv roj pleev txhua yam tshiab, txhim kho Polishing cov kev tso nyiaj los ntawm 15%.
Samsung Electronics 3NM Txheej Txheem Tshawb Fawb: Aluminium Cov Khoom Siv Hluav Taws Xob tuaj yeem txo Wafer Edge Rure rau hauv qab 0.01%.
Kev ua txuj ci: Raws li Chip tsim cov txheej txheem txav ntawm 2 nm thiab hauv qab no, lub tiaj tiaj uas yuav tsum tau tsim cov cab kuj tau nkag mus rau cov nanometer ntau (<10nm). Through precision laser trimming technology, aluminum oxide ceramic discs are breaking through the limits and continuing to safeguard semiconductor manufacturing.