Khoom Description
Hauv kev txiav-ntug ntawm kev tsim khoom semiconductor, alumina ceramic chamber inserts ua haujlwm hauv ob sab phlu thiab cov khoom siv tseem ceeb rau cov txheej txheem tseem ceeb. Nrog lawv cov khoom tshwj xeeb, lawv muab qhov chaw ruaj khov, ntshiab, thiab ruaj khov rau cov txheej txheem tseem ceeb xws li nti etching, nyias - zaj duab xis deposition (CVD/PVD), thiab ion implantation. Lawv qhov kev ua tau zoo cuam tshuam ncaj qha rau cov txheej txheem precision, cov khoom tsim tawm, thiab cov khoom siv ua haujlwm.
Khoom ua haujlwm
- Exceptional Plasma Corrosion Resistance: Thaum lub sij hawm etching thiab CVD cov txheej txheem, cov chav tau ntim nrog siab - zog, plasmas reactive heev (xws li, fluorine- lossis chlorine-raws li). High-purity alumina ceramics muaj cov tshuaj lom neeg tsis txaus ntseeg, tiv thaiv kev foob pob thiab tshuaj lom neeg los ntawm cov plasmas.
- Exceptional Purity thiab Low Contamination: Lub siab purity ntawm 99.9% alumina ceramics-thiab txawm tias 99.99% alumina ceramics- xyuas kom cov hlau ions tsawg tsawg (xws li Na, K, Fe) lossis lwm yam impurities nyob rau hauv siab - kub thiab ntshav ntshav.
- Superior High-Tsub Stability thiab Low Outgassing Rate: Siab-kub-resistant alumina ceramics tuav ntev- lub sij hawm ruaj khov ntawm 1600℃. Lawv cov thermal expansion coefficient tsawg tsawg ua rau muaj qhov deformation tsawg heev thaum rov qab thermal cycling.
- Exceptional mechanical zog thiab rigidity: Txawm tias yog ceramic, siab -purity alumina ceramic exhibits zoo flexural zog thiab hardness (Mohs hardness 9, thib ob tsuas yog pob zeb diamond). Nws withstands mechanical stresses thiab assembling loads, kom ntseeg tau chamber structural kev ncaj ncees.
- Cov Khoom Hluav Taws Xob Zoo Tshaj Plaws: Raws li cov khoom siv hluav taws xob zoo tshaj plaws, nws muaj txiaj ntsig zoo cais cov ntshav los ntawm cov kab noj hniav hlau, pab tswj cov ntshav plasma morphology thiab kev faib tawm.
- Thermal Shock Resistance: Los ntawm optimized cov ntaub ntawv formulations thiab microstructural tswj, niaj hnub alumina structural ceramics nthuav qhia kev txhim kho thermal poob siab, ua rau lawv tiv taus kub hloov pauv sai thaum ua thiab txo qhov kev pheej hmoo ntawm kev tawg.
Daim ntawv thov khoom
- Tiv thaiv lub chamber tseem ceeb: Tiv thaiv cov tshuaj tiv thaiv los ntawm cov khoom tsim tawm thaum lub sijhawm txheej txheem (yog tias cov ntaub ntawv zaj duab xis thiab cov khoom siv los ntawm cov khoom siv) los ntawm kev tso ncaj qha rau ntawm cov khoom kim thiab nyuaj - rau- ntxuav cov phab ntsa ruaj khov thiab cov khoom tseem ceeb, ua kom lub neej ntev ntawm cov khoom siv tseem ceeb thiab txo cov nqi tu.
- Tswj Kev Ua Kom Huv Huv: Txo cov khoom seem hauv lub chamber los ntawm kev ntes cov kab mob thiab cov khoom siv. Thaum ntxig cov npoo ua ntau dhau los yog cov kab mob hnyav heev, lawv tuaj yeem hloov tau ncaj qha, rov ua kom huv huv sai thiab tiv thaiv cov khoom tawm los.
- Optimize Process Performance: Qee qhov ntxig (yog tias cov pa hluav taws xob faib hluav taws xob) ncaj qha koom nrog hauv cov txheej txheem, kom ntseeg tau tias muaj kev sib faib ntawm cov tshuaj tiv thaiv cov pa hauv lub chamber. Qhov no guarantees uniformity nyob rau hauv zaj duab xis deposition los yog etching.
kev tswj kom zoo
Peb ua raws li ISO 9001 Kev Tswj Xyuas Kev Tswj Xyuas Zoo kom ntseeg tau tias cov khoom zoo sib xws:
- 100% tshuaj xyuas cov ntaub ntawv raw kom lav zoo los ntawm qhov chaw;
- Kev siv cov kub siab heev- nias cov kab ntau lawm rau cov txheej txheem meej thiab txhim khu kev qha;
- Hauv -Kev ntsuas kev ua haujlwm hauv tsev, suav nrog qhov ntom ntom, hardness, thiab microstructure tsom xam;
- Muaj cov ntawv pov thawj thib peb ntawm - tog neeg pov thawj (xws li SGS, CE, ROHS, muaj nyob rau ntawm kev thov).
Daim ntawv pov thawj thiab Honors
Lub tuam txhab tau raug lees paub tias yog National High -Tech Enterprise thiab yog ib qho kev txawj ntse hauv Shaoxing City "Land of Eminent Scholars." Peb pab pawg R&D tshwj xeeb suav nrog cov kws tshaj lij thiab PhDs tshwj xeeb hauv cov khoom siv ceramic thiab cov khoom siv, suav nrog silicon carbide, siab -purity silicon carbide, boron carbide, pob zeb diamond silicon carbide, yttrium oxide, aluminium oxide, thiab txhuas nitride. Peb tau ua ntawv tshaj 30 Suav patents. Peb muaj cov txheej txheem thev naus laus zis, kev paub zoo xws li sintering, sib sau, sib tsoo, CNC machining, laser drilling, lapping, thiab polishing. Peb kho txhua hom khoom siv ceramic raws li cov neeg siv khoom xav tau.
Hoobkas zog
Peb cov kev cob qhia digital, Lub Hoobkas Txawj Ntse, thiab lub sijhawm tiag tiag - cov ntaub ntawv tau txais cov tshuab siv cov qauv tsim tawm kom txo qis thiab ua kom muaj txiaj ntsig zoo tshaj plaws. Los ntawm kev koom nrog CNC machining thev naus laus zis, Industrial Internet ntawm Yam (IIoT) thev naus laus zis, thiab kev tswj hwm lub tshuab ua haujlwm, peb ua tiav kev sib txuas thiab kev sib koom ua haujlwm ntawm cov cuab yeej tsim khoom, yog li ua kom txuag tau ntau lawm.
Cim npe nrov: chamber insert, chamber insert manufacturers, lwm tus neeg, Hoobkas
